HEA|  |01294nam0 2200265   45  
001|  |0149174574
005|  |1920011215145007
010|  |□d￥2.45
091|  |□aCN□b13071.143
100|  |□a20010623d1992    em y0chiy0121    eb
101|0 |□achi
102|  |□aCN□b110000
105|  |□ay   z   000yy
106|  |□ar
200|1 |□a离子注入原理与技术□f北京市辐射中心，北京市师范大学低能-
   |  |核物理研究所离子注入研究室编著□Ali zi zhu ru -
   |  |yuan li yu ji shu
210|  |□a北京□c北京出版社□d1982
215|  |□a365页□d25cm
606|0 |□a半导体工艺□x离子注入
690|  |□aTN305.3
711|02|□a北京市辐射中心□4编著□Abei jing shi fu-
   |  | she zhong xin
711|02|□a北京师范大学低能核物理研究所离子注入研究室□4编著□Ab-
   |  |ei jing shi fan da xue di neng-
   |  | he wu li yan jiu suo li zi zh-
   |  |u ru yan jiu shi
801| 0|□aCN□bMT
905|  |□aMT□fTN305.3/4□b0159467□t1187-
   |  |677□kwe□b0159473□t1187678□kwe□-
   |  |b0363028□t1187680□kj□b0665904□-
   |  |t1187681□kj□b0665948□t1187682□kj
908|  |□a0159473□b464109□cMT□d0□e2□fT-
   |  |N305.3/4□gMT□hyt□i□j2.45□k□l1-
   |  |□m□n□o平装□p1187678□q2002-06-10□-
   |  |r2.45□t□u□v999_CN01□w2002-06-10□y订购□zyt
908|  |□aM0159473□b1900021910□cMT□d□e-
   |  |2□fTN305.3/4□gMT□hyt□i□j2.45□-
   |  |k□l1□m□n□o平装□p□q2002-06-10□r□t-
   |  |□u□v999_CN01□w2002-06-10□y□zyt